Scanning Electron Microscopes (SEM)

ThermoFisher® Apreo 2S HiVac

Schottky Field Emission Scanning Electron Microscope (FESEM) that combines high and low-voltage ultra-high resolution capabilities with an electrostatic lens design.

Specifications and Capabilities:

  • Voltage: 200 eV to 30 kV, Currents: 1pA to 50 nA.
  • Resolution: 0.7 nm at 30 kV (STEM), 0.9 nm at 1 kV.
  • Secondary Electron (SE) imaging with a Trinity detection system comprising a lower in-lens detector (T1), an upper in-lens detector (T2), and an in-column detector (T3).
  • Back-Scattered-Electron (BSE) imaging with a retractable ultra-sensitive Directional Backscatter (DBS) detector, which is sensitive to emitted electrons from 500 V onwards.
  • PivotBeamTM  (rocking beam) with functionality for selected area electron channeling contrast imaging.
  • Dual Bruker 6|60 EDS detector for qualitative and quantitative X-ray microanalysis.
  • Energy Resolution < 129 eV.
  • It is incorporated with sixth generation XFlash® detector that provides extremely high throughput rates. Each detector is 30 mm2 area with thirty times faster acquisition than conventional Si(Li detectors).
User Manual

ThermoFisher® XL-30 ESEM

30 kV Tungsten source environmental SEM for SE/BSE imaging with EDS spectroscopy.

Specifications and Capabilities:

  • Tungsten source with variable high tension up to 30kV
  • Everhart Thornley (ET) detector for SE imaging and solid-state detector for BSE imaging.
  • EDAX® EDS detector for X-ray analysis. Coupled with GENESISTM software
  • Environmental imaging ability under 1 Torr to 20 Torr pressure

Faculty In-charge: Prof. Sajeev Krishnan, Prof. Satyam Suwas

User Manual

JEOL SEM IT 300

30 kV Tungsten source SEM for SE/BSE imaging with EDS spectroscopy and Cathodoluminescence (SEM-CL) experiments.

Specifications and Capabilities:

  • Tungsten source with variable high tension up to 30kV
  • Load lock chamber for quick sample exchange and stage navigation system.
  • SE/BSE imaging with resolution up to 3 nm (30kV) and 15 nm (1kV) in HV mode and 4 nm (30kV BED) LV mode
  • Cathodoluminescence (SEM-CL) detector for CL experiments.
  • EDAX® EDS detector for X-ray analysis.

Faculty In-charge: Prof. Sajeev Krishna

User Manual
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